发明名称 |
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, ELECTOOPTICAL DEVICE, AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having a transparent oxide layer in which a source portion, a drain portion and a channel portion are integrally formed of a transparent oxide-based material, to provide a manufacturing method thereof, and to provide an electrooptical device and an electronic apparatus equipped with the semiconductor device. SOLUTION: This semiconductor device 1 has a substrate 8; the transparent oxide layer 2 equipped with a source portion 3 and a drain portion 4 provided on at least one surface of the substrate 8 and a channel portion 5 formed integrally with the source and drain portions 3, 4 and having a thickness smaller than the thicknesses of the source and drain portions 3, 4; a gate portion 7; and a gate insulating layer 6. COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008153535(A) |
申请公布日期 |
2008.07.03 |
申请号 |
JP20060341652 |
申请日期 |
2006.12.19 |
申请人 |
SEIKO EPSON CORP;SHINSHU UNIV |
发明人 |
KAMIKAWA TAKETOMI;ICHIKAWA YU;NAKAMURA KIYOSHI |
分类号 |
H01L29/786;G02F1/167;H01L21/28;H01L21/336;H01L29/417 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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