METHOD FOR PREPARING ZnO NANOCRYSTALS DIRECTLY ON SILICON SUBSTRATE

摘要

A method for preparing a ZnO nanocrystal directly on a silicon substrate includes the steps of: (S 1 ) forming a Zn-Si-O composite thin film on the silicon substrate; and (S 2 ) thermally treating the obtained thin film. Particularly, ZnO nanocrystals are formed in an amorphous Zn-Si-O composite thin film by controlling the composition of the Zn-Si-O composite thin film and heating temperature thereof. With the present invention method for preparing a ZnO nanocrystal directly on a silicon substrate, more possibilities are opened up for the applications of ZnO nanocrystals to an optoelectronic device in use of a silicon substrate.