| 摘要 |
An apparatus and a method for depositing an organic film on a substrate are provided to improve deposition uniformity of an organic material by heating and evaporating the organic material in a container. An apparatus for depositing an organic film on a substrate includes a process chamber, a substrate supporter, and a source supply member. The substrate is positioned in the process chamber and supports the substrate to allow a deposition surface to be directed downward. The source supply member a container of a linear structure which contains an organic material and a heating member(310) heating the organic material contained in the container by providing heat for each region in a lengthwise direction of the container differently. |
