发明名称 CLEANING METHOD OF TAB AND COF
摘要 A method for eliminating foreign materials in manufacturing a flip chip mounting film is provided to prevent secondary contamination due to an adhesive material by using a rubber roller. A method for eliminating foreign materials in manufacturing a flip chip mounting film comprises a step of winding a flip chip mounting film wherein a pattern is formed through a photoresist coating step, an exposing step, a developing step, and a peeling step on an upper part of copper foil formed on an upper surface of PI(Polyimide)(20). A foreign material eliminating step for eliminating the foreign materials(21) on the PI via a foreign material eliminating device, installed at a lower part of the PI, is also included before wind of the flip chip mounting film after the peeling step. The foreign material eliminating step has the foreign material eliminating device made of a rubber roller(30).
申请公布号 KR20080062681(A) 申请公布日期 2008.07.03
申请号 KR20060138747 申请日期 2006.12.29
申请人 LG MICRON LTD. 发明人 LEE, SU HYUNG
分类号 H01L21/48 主分类号 H01L21/48
代理机构 代理人
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