| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating device capable of carrying out treatment on a plurality of faces of a work. <P>SOLUTION: A first chamber 1 and a second chamber 3 carrying out given treatments on works are arrayed in a row with an inter-chamber conveying mechanism 7. The first chamber 1 includes two SWP units 11 on its top face and has generation spaces B formed for ground wave plasma to be generated above the works W. The second chamber 3 includes two SWP units 11 at its bottom face, and has generation spaces B formed under the works W. With this, given treatments can be carried out on both top and bottom faces of the works W. <P>COPYRIGHT: (C)2008,JPO&INPIT |
