ACTIVE MATRIX SUBSTRATE AND DISPLAY DEVICE WITH IT

摘要

PROBLEM TO BE SOLVED: To provide an active matrix substrate and a display device with it, capable of reducing capacity formed at an intersection between scanning wiring and signal wiring without an increase of wiring resistance and lowering of driving capability of a switching element.

SOLUTION: The active matrix substrate includes a substrate 10; signal wiring 11 formed on the substrate 10; scanning wiring 13 intersecting the signal wiring 11; a bottom gate type thin film transistor 14 operating in response to a signal applied to the scanning wiring 13; and a pixel electrode 15 capable of being electrically connected to the signal wiring 11 via the thin film transistor 14. The signal wiring 11 is formed on a lower layer of the scanning wiring 13 via a first interlayer insulating film 12 and is electrically connected to a source electrode 14S of the thin film transistor 14 via a contact hole 12' formed in the first interlayer insulating film 12. The first interlayer insulating film 12 is thicker than the gate insulating film 16 and is lower in a specific dielectric constant than the gate insulating film 16.

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