| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly-accurate interference measuring device for changing at high speed an optical path difference of an interferometer into a sine wave shape, allowing a light source to emit light at a timing when the optical path difference is on a prescribed position necessary for a phase shift method, and acquiring an interference image of an object surface. SOLUTION: This device has characteristics wherein an interference optical system comprising the light source, a phase shifter drivable in a sine wave, and an imaging device capable of imaging timing control is used, and a light emission timing from the light source, a moving amount of the phase shifter, and an imaging timing of the imaging device are controlled synchronously, and a height is calculated from a plurality of interference images imaged by changing the optical path difference. COPYRIGHT: (C)2008,JPO&INPIT
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