发明名称 ACCELERATION SENSOR WITH REDUNDANT ACCELEROMETERS
摘要 An acceleration measurement system (200) is provided. The system (200) includes at least first and second accelerometers (222, 224, 225, 228, 230). The first accelerometer (222) has an electrical characteristic that varies with acceleration in a first axis. The second accelerometer (224) also has an electrical characteristic that varies with acceleration in the same first axis. A controller (208) is operably coupled to the first and second accelerometers (222, 224, 226, 228, 230) and provides an acceleration output (256) that is based on the electrical characteristics of the first and second accelerometers (222, 224, 226, 228, 230). In one aspect, the acceleration system is in the form of a substrate-like sensor (100). By reading signals from several redundant accelerometers connected in parallel, the signal - to - noise ratio can be reduced.
申请公布号 WO2008042200(A3) 申请公布日期 2008.07.03
申请号 WO2007US20815 申请日期 2007.09.27
申请人 CYBEROPTICS SEMICONDUCTOR, INC.;RATE, BERNARD, J.;LIM, ANDY, K.;BONCIOLINI, DENNIS, J. 发明人 RATE, BERNARD, J.;LIM, ANDY, K.;BONCIOLINI, DENNIS, J.
分类号 G01M99/00;G01P15/08;G01P15/18;G03F7/20;H01L21/00 主分类号 G01M99/00
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