MICROSCOPE UNIT FOR THE INSPECTION / PROCESSING, AND, A METHOD

摘要

A microscope unit and a method for inspection and processing are provided to exactly adjust a focus by preventing diffused reflection of a laser beam due to variation from a fine circuit pattern of a substrate. A microscope unit(100) for inspection and processing includes an illumination module(112), a CCD(Charge Coupled Device) camera(110), a focusing module(120), and an optical module(130). The illumination module irradiates light to a substrate(S). The CCD camera images the substrate by using the light irradiated from the illumination module so that the substrate is inspected. The focusing module irradiates an additional laser beam to the substrate and adjusts a distance between the focusing module and the substrate always by impinging the irradiated laser beam. The optical module adjusts a magnification between the substrate and a laser(111) based on the adjusted value obtained by the focusing module so that the substrate is processed.