| 摘要 |
PROBLEM TO BE SOLVED: To provide a unit performing pitch conversion of a probe card used for inspecting a semiconductor wafer. SOLUTION: The pitch conversion unit electrically connecting a contact section having a plurality of contactors respectively coming into conduction contact with a plurality of inspection points provided on a semiconductor integrated circuit element formed on a semiconductor wafer to an inspection apparatus having a section for judging whether the semiconductor integrated circuit element is acceptable or not comprises a plurality of contact terminals having one end coming into conduction contact with the contactor at the contact section and a length preset for every predetermined group, a connector having a holder for holding the plurality of contact terminals, and a conversion section having one end coming into conduction contact with the other end of the contactor and the other end formed at an arrangement pitch wider than that of one end and coming into conduction contact with the electrode of the inspection apparatus wherein the other ends belonging to the same group are arranged on the same plane. COPYRIGHT: (C)2008,JPO&INPIT
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