| 摘要 |
A method for forming patterns by using a printing mode is provided to form convex patterns on the surface of a printing roll corresponding to a location where an ink pattern will be formed, thereby simplifying a printing process. A micro pattern forming method using an off set printing mode comprises the following steps. First and second printing rolls each having first and second blankets(143) in the surface are prepared. An organic layer(147) is applied to the surface of the first blanket. A cliche(151) having plural concave patterns(151A) is prepared. The concave patterns are formed in the same form as a pattern which will be formed. An interval between the concave pattern and a neighboring concave pattern is relatively wide. A first organic pattern(147A) is formed in the surface of the first blanket contacted with the concave pattern by rotating the first printing roll in a state when the cliche is contacted with the organic layer. A second organic pattern(147B) is formed on the cliche between the concave patterns. A second organic pattern is transferred onto the surface of the second blanket by rotating the second printing roll in a state when the cliche having the second organic pattern is contacted with the second blanket. A substrate having an etch object layer is provided. The second organic pattern is re-transferred onto the etch object layer by rotating the second printing roll in a state when the substrate is contacted with the transferred second organic pattern. The re-transferred second organic pattern is cured. By etching the etch object layer by using the cured second organic pattern as a mask, an etch object pattern is formed. |
