| 摘要 |
An apparatus and a method for inspecting the surface of a flat panel, and a method for manufacturing a panel for a flat panel display using the same are provided to measure the existence and height of a particle, thereby preventing equipment for performing coating and exposing on a glass panel from being damaged by the particle on the glass panel. An apparatus for inspecting the surface of a flat panel includes a light emitting unit(100) and a light receiving unit(110). The light emitting unit proceeds along an optical axis parallel with the upper surface of an inspection target object(50) of a flat panel shape, radiates measuring light(300), where optical energy is distributed, along a direction perpendicular to the upper surface of the inspection target object, and is disposed on the side of the inspection target object. The light receiving unit is disposed to face the light emitting unit in the other side of the inspection target object and detects the measuring light. |
