发明名称 METHOD FOR PRODUCING A SEMICONDUCTOR-ON-INSULATOR STRUCTURE
摘要 <p>The invention relates to a process of treating a structure for electronics or optoelectronics, the structure comprising successively: - a substrate, - a first oxide layer, - an intermediate layer, - a second oxide layer made of an oxide of a semiconductor material, - a thin semiconductor layer made of said semiconductor material, characterized in that it comprises a heat treatment of the structure in an inert or reducing atmosphere with a temperature and a duration chosen for inciting an amount of oxygen of the second oxide layer to diffuse through the semiconductor layer so that the thickness of the second oxide layer decreases by a determined value. The invention also relates to a process of manufacturing a structure for electronics or optoelectronics comprising the said heat treatment.</p>
申请公布号 WO2008078133(A1) 申请公布日期 2008.07.03
申请号 WO2006IB03958 申请日期 2006.12.26
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES;KONONCHUK, OLEG 发明人 KONONCHUK, OLEG
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
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