OPTICAL SEMICONDUCTOR ELEMENT AND ITS FABRICATION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide an optical semiconductor element in which an end face can be formed at a target position with good reproducibility and decline in coupling efficiency with an optical fiber can be suppressed.

SOLUTION: An active layer (18) is formed on a semiconductor substrate having a pair of end faces (15A, 15B) that face the opposite directions mutually. An upper clad layer (19) having a refractive index smaller than that of the active layer is formed on the active layer. A grating (25) is arranged in the upper clad layer on the opposite sides of a distribution feedback region of a waveguide region (22) having end regions (22B) defined at the opposite ends and the distribution feedback region (22A) defined internally and extending from one end face to the other end face of the semiconductor substrate. A low refractive index region (26) having a refractive index lower than that of the upper clad layer is arranged in the upper clad layer on each side of the end region of the waveguide region.

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