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发明名称
DOME TEMPERATURE CONTROL UNIT OF PLASMA DRY ETCH APPARATUS
摘要
申请公布号
KR100843958(B1)
申请公布日期
2008.07.03
申请号
KR20030085205
申请日期
2003.11.27
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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