| 摘要 |
PROBLEM TO BE SOLVED: To easily know distribution of plasma. SOLUTION: A testing substrate 101 is prepared which comprises a test pattern region consisting of a recess 102b, a recess 102c, a recess 102d, and a recess 102e. Then, a mask layer 103 is formed on the testing substrate 101 where the recesses are formed and a plurality of openings 104 are formed in the mask layer 103. After the testing substrate 101 is prepared, the testing substrate 101 is exposed to the plasma of C<SB>4</SB>F<SB>8</SB>gas, so that a protective film (deposits) 110 is formed on the side surface of the openings 104, on the surface of a region 102a, on a bottom part 105b and side wall 106b of the recess 102b, on a bottom part 105c and side wall 106c of the recess 102c, on a bottom part 105d of a part of the recess 102d, and on a bottom part 105e of a part of the recess 102e. COPYRIGHT: (C)2008,JPO&INPIT
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