| 摘要 |
PROBLEM TO BE SOLVED: To precisely and quickly estimate the temperature of an estimation object by light computation processing. SOLUTION: This temperature estimation device 50 has a storage part for storing parameters of a heat transfer model as to a heater 3 and a workpiece 1, a temperature variation estimating part for finding the second temperature variation temporary estimation value of the workpiece 1, that is a value when a heat capacity of the workpiece 1 is presumed not to be changed, based on an observed value of a temperature variation of the heater 3, and a temperature variation temporary estimation value of the heater and the first temperature variation temporary estimation value of the workpiece 1, which are values estimated based on the heat transfer model, a heat resistance value change coefficient estimating part for estimating a change of a heat resistance value, based on the second temperature variation temporary estimation value of the workpiece 1 and the heat transfer model, and a temperature estimation part for estimating a true value of the temperature of the workpiece 1, based on the temperature and a change of heat resistance value of the heater 3 in a different sampling time. COPYRIGHT: (C)2008,JPO&INPIT
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