| 摘要 |
PROBLEM TO BE SOLVED: To provide an applying apparatus capable of precisely measuring the quantity of a solution to be discharged from a nozzle of an applying head. SOLUTION: The applying apparatus for solution, by which the solution is supplied and applied to a substrate, is provided with: the applying head 22 having the nozzle for discharging the solution; a piezoelectric device provided on the coating head and worked by applying voltage to the device to discharge the solution from the nozzle; and a measuring device 41 for detecting the length of the solution discharged from the nozzle. COPYRIGHT: (C)2008,JPO&INPIT
|
