| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device which facilitates manufacture and installation and requires no adjustment of a rail because a deviation in a gap between a nozzle and a substrate is eliminated. SOLUTION: The coating device 1 is provided with a substrate holding stage 2 equipped with a substrate holding region 11 with the upper part 6 at the central part and equipped with a flat region 10 installed at a position from outside in a width direction of the substrate holding region 11 to a side edge 10a, and is provided with a slider 3 arranged in line in a width direction of the substrate holding stage and having a pair of holding members 4 holding a nozzle 5. The holding members 4 are respectively formed as engaging parts 13 extending in a side-surface direction of the substrate holding stage at the position of the outside of the side edge of the substrate holding stage at their lower ends, the inside of the side edge at their lower ends is placed to the flat region 10, and the engaging parts are arranged along the side surface, thereby preventing the substrate holding stage 2 of the slider 3 from deviating in a width direction. COPYRIGHT: (C)2008,JPO&INPIT
|
