Polymer having antireflective properties, hardmask composition including the same, and process for forming a patterned material layer

摘要

A naphthalene-backbone polymer represented by Formula 1: wherein n and m are independently at least 1 and less than about 190, R₁ is a hydrogen, a hydroxyl, a hydrocarbon group of about 10 carbons or less, or a halogen, R₂ is methylene or includes an aryl linking group, R₃ is a conjugated diene group, and R₄ is an unsaturated dienophile group.