APPARATUS AND METHOD OF FORMING PATTERN USING INKJET PRINTING AND NANO IMPRINTING

摘要

An apparatus and method of forming a pattern using an inkjet printing method and nano imprinting method. The method includes partially inkjet printing a material for forming the pattern on a surface of the substrate using an inkjet head, and forming a predetermined pattern by imprinting the inkjet printed material on the surface of the substrate using an imprint mold. The method also includes partially inkjet printing a material for forming the pattern in an imprint mold using an inkjet head, and forming a predetermined pattern by imprinting the material on a surface of the substrate using the imprint mold. During the partial inkjet printing, at least two materials that are different from each other are inkjet printed on different locations of the surface of the substrate.