| 摘要 |
<p>PURPOSE: A repair/diagnosis data accumulating server, a repair/diagnosis data accumulating/obtaining system, and a repair/diagnosis data accumulating/offering system in a remote place are provided to repair/diagnosis various kinds of devices in the remote place, and plan maintenance of security when the system is not used in the remote place. CONSTITUTION: The system includes an equipment group-A(10), an equipment group-B(11), intranet(21), firewalls(22,24), the repair/diagnosis data accumulating server(23), the Internet(25), and clients(26,27). The server collects/accumulates the repair/diagnosis data for semiconductor manufacturing devices(1-3,5-7) through the intranet. In case that data access is requested from an Internet side, the server receives a result by requesting user certification to a group management server(4) or the semiconductor manufacturing devices through the intranet. In the case that the result is normal, the repair/diagnosis data is output to the Internet side. The clients receive the repair/diagnosis data from the server through the Internet and analyze the received data.</p> |
