| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a probe capable of relatively easily being peeled off from a base without damaging the probe after depositing a metallic material for the probe on the base. <P>SOLUTION: On a sacrificial layer of a base, a recess corresponding to a plane shape of a probe is formed using a resist mask. With depositing a probe material in the recess, the probe composed of the probe material is formed on the base through the sacrificial layer. Thereafter, the resist mask is removed, and furthermore the sacrificial layer is removed with one part left by an etching processing. To penetrate and form openings for controlling the left part of the sacrificial layer by this etching processing in the thickness direction of the probe plate, punch holes of these openings are formed at the resist mask. Corrosion of the sacrificial layer is advanced from the edge parts of the openings formed by these punch holes in the probe. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
