| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser drawing apparatus wherein it is so constituted that even a largely deflected laser light is always made incident on the pupil center of its objective lens, and its image-plane curvature and its miscellaneous aberrations can be reduced, and further, its structural space can be reduced. SOLUTION: The laser drawing apparatus has a laser light source 4, a scanning portion 5 for deflecting a laser light 6 made outgoing from the laser light source 4, and opposite first and second fθlens groups to each other 2, 3 for making the deflected laser light 6 incident on an objective lens 7. The first ad second fθlens groups are so constituted that their exit pupils are infinite and that they are telecentric optical systems and that the laser light 6 is always made incident on the pupil center of the objective lens 7. COPYRIGHT: (C)2008,JPO&INPIT
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