| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a non-contact micro mirror device. SOLUTION: The micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge includes a length longer than 1 micron, a thickness less than 800 nanometers, and a width less than 1,000 nanometers. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position. COPYRIGHT: (C)2008,JPO&INPIT
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