| 摘要 |
<p>A method for checking the factors generating foreign materials of a photo mask is provided to estimate the life time of growable foreign material generation due to a layer adhesive agent by measuring and analyzing the generation of growable foreign material. A photo mask on which a pellicle is mounted, is loaded into a haze accelerating apparatus(110). A light is irradiated onto a rear of the photo mask to generate a growable foreign material(120). The photo mask of which the growable foreign material is generated is unloaded from the haze accelerating apparatus(130). The growable foreign material of the unloaded photo mask is observed(140). The light is accelerated and irradiated to a layer adhesive agent for attaching the photo mask to a pellicle.</p> |
