SHAPE MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To solve the problems that resolution in axial directions has been coarse since a plurality of displacement meters is arranged in the width direction of an object to be measured to measure irregularities in a conventional shape measuring apparatus and that stable measurement has not been possible due to low levels of light reception signals of an imaging device or large differences between light reception levels within a measuring range in a method for using spot light and a light scanning device to scan a light spot in the width direction of the object to be measured and image the spot light scanned by the imaging device. SOLUTION: A shape measuring apparatus is provided with both: a slit light source arranged in a plane perpendicular to a line parallel to a transfer direction of an object to be measured for irradiating slit light in the width direction of the surface of the object to be measured in the plane; and the imaging device arranged on the side opposite to the slit light source via a plane perpendicular to the plane and perpendicular to the surface of the object to be measured for imaging slit light on the object to be measured. The irregularity measuring device is provided in the width direction and the transfer direction to compute actualized shapes. COPYRIGHT: (C)2008,JPO&INPIT