| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope system capable of simultaneously performing both of spot irradiation with particular light such as deep ultraviolet and optical observation not sacrificing imaging performance. SOLUTION: In the microscope system equipped with a first objective lens 14 and a second objective lens 16 at positions facing each other across a sample 4, the first objective lens 14 is an objective lens transmitting the deep ultraviolet and the second objective lens 16 is configured to collect observation light from the sample 4. COPYRIGHT: (C)2008,JPO&INPIT
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