发明名称 CMOS IMAGE SENSOR AND METHOD OF MANUFACTURING THEREOF
摘要 A CMOS image sensor comprising an epitaxial layer formed on a semiconductor layer, a device isolating layer formed on the epitaxial layer in order to divide the isolating layer into an active region and a device isolating region, the active region including a photo diode region and a transistor region, a drive transistor including a gate electrode formed on the epitaxial layer and a gate spacer formed on both side walls of the gate electrode, a floating diffusion region formed on the epitaxial layer, a trench hole formed in the device isolating layer and epitaxial layer in an area between the photo diode region and the floating diffusion region, a poly wiring formed in the trench hole which extends from the gate electrode to the drive transistor, and an impurity diffusion region formed by ion implanting the epitaxial layer on the side of the gate spacer.
申请公布号 US2008157143(A1) 申请公布日期 2008.07.03
申请号 US20070948783 申请日期 2007.11.30
申请人 DONGBU HITEK CO., LTD. 发明人 LIM KEUN HYUK
分类号 H01L31/113;H01L21/00 主分类号 H01L31/113
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