发明名称 SEMICONDUCTOR DEVICE CAPACITOR FABRICATION METHOD
摘要 A semiconductor device capacitor fabrication method that is capable of enabling the simultaneous use of an oxide capacitor and a PIP capacitor of a semiconductor device depending upon whether metal line terminals are used. The semiconductor device capacitor fabrication method can include forming an active region and a first gate electrode over a semiconductor substrate, partially depositing a silicon nitride layer, over which a capacitor will be formed, over the first gate electrode, forming a second gate electrode over the silicon nitride, sequentially forming a first insulation layer and a second insulation layer over the resultant structure and forming line terminals extending through the first insulating layer and the second insulating layer for a transistor and a capacitor.
申请公布号 US2008157158(A1) 申请公布日期 2008.07.03
申请号 US20070957982 申请日期 2007.12.17
申请人 AHN JUNG-HO 发明人 AHN JUNG-HO
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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