Multilevel-image acquisition focusing arrangement for use in prober, has lens provided on surface of object independent of drive of microscope in focus plane, and another focus plane lying in height of tip and focusing lens focusing system

摘要

The arrangement has a clamping plate arranged over a clamping device (4), and mounting devices fastened to the clamping plate. An image detection device (11) is arranged over an observation hole. An object lens is provided on an upper surface (10) of a test object (5) i.e. semiconductor wafer, independent of a vertical adjustment drive of a confocal microscope (12) in a focus plane. Another focus plane lies in a height of a probe needle tip and is provided for focusing a microscope object lens focusing system. An independent claim is also included for a method for focusing a multilevel-image acquisition in a prober.