| 摘要 |
A deposition apparatus is provided to reduce cost for maintenance and manufacture of the deposition apparatus by replacing only a damaged mask among the masks divided by a reinforcing member. A deposition apparatus(1) includes a substrate support(20), a magnetic unit(30), and a mask unit(100). The substrate support supports a substrate(10). The magnetic unit and the mask unit are arranged while interposing the substrate support therebetween. The mask unit is moved by the magnetic unit and has a reinforcing member(120) to support the substrate. The mask unit has a plurality of masks(110) connected by the reinforcing member. |
