| 摘要 |
PROBLEM TO BE SOLVED: To scan and irradiate the upper section of a body to be irradiated with laser beams more uniformly. SOLUTION: Laser beams output from a beam source section 1 are deflected by a scanning section 3, a feed stage 18 placing the body 10 to be irradiated is moved and the specified region of the body 10 is scanned and irradiated with laser beams. A speed moving at a distance section corresponding to an irradiation effective diameter at the laster beam irradiation place of the body 10 during a scanning period of the scanning section 3 is used as a travel speed in scanning by the feed stage 18 for the body 10. COPYRIGHT: (C)2008,JPO&INPIT
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