摘要 |
PROBLEM TO BE SOLVED: To provide fine titanium-based compound oxide powder having dielectric properties. SOLUTION: A titanium tetrachloride solution in which, as a Ti-O bonded state decided using an extended X-ray absorption fine structure analysis process, the ratio between the content A of an anatase type bond and the content R of a rutile type bond, A/R is≤2.2 is used as a raw material solution in the production of the powder of a titanium-based compound oxide by an oxalate process. The titanium-based compound oxide powder having a tetragonal crystal form with excellent dielectric properties, and also having the average particle diameter of≤0.2μm is produced. COPYRIGHT: (C)2008,JPO&INPIT
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