发明名称 |
INCIDENCE SURFACES AND OPTICAL WINDOWS THAT ARE SOLVOPHOBIC TO IMMERSION LIQUIDS |
摘要 |
Optical windows are provided that transmit light such as deep-UV (DUV) light. An exemplary window includes a window substrate that is transmissive to at least one wavelength of the light. The window substrate has an incidence surface decorated with sub-wavelength asperities arranged so as to render the incidence surface solvophobic to the light-transmissive liquid. The arrangement of sub- wavelength asperities can be configured to render the incidence surface super- solvophobic to the liquid. The sub-wavelength asperities can have any of various shapes and combinations thereof, and can be regularly or irregularly arranged. |
申请公布号 |
WO2007118014(A3) |
申请公布日期 |
2008.07.03 |
申请号 |
WO2007US65381 |
申请日期 |
2007.03.28 |
申请人 |
NIKON CORPORATION;SOGARD, MICHAEL, R. |
发明人 |
SOGARD, MICHAEL, R. |
分类号 |
G02B1/10 |
主分类号 |
G02B1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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