| 摘要 |
An LCD manufacturing method is provided to prevent Na+ alkali ion from being re-attached to a process chamber or a plasma deposition film in a plasma deposition process, thereby minimizing pollution of a substrate and equipment. An LCD(Liquid Crystal Display) manufacturing method comprises the following steps. A plasma deposition chamber is provided. The plasma deposition chamber has a lower electrode(201) and an upper electrode spaced from the lower electrode with a predetermined interval. On the lower electrode, an alkali glass substrate is mounted. A plasma deposition film(109) is formed on the glass substrate by generating plasma between the upper electrode and the lower electrode. While the plasma deposition film is formed, an alkali ion is emitted from the glass substrate. By applying + voltage to the lower electrode, repellent force is generated between the glass substrate and the alkali ion. |
