APPARATUS FOR MANUFACTURING FLAT PANEL DISPLAY

摘要

A flat panel display manufacturing apparatus is provided to increase a flow rate by generating eddy when a treatment chemical solution is drained, thereby rapidly draining the chemical solution. A flat panel display manufacturing apparatus includes a process chamber in which a substrate is treated with chemicals and a drain unit(200). The drain unit is arranged under an inner processing bath of the process chamber and includes a receiving bath(204) having eddy protrusions(208) such that treatment chemicals eddy when the chemicals are discharged from the process chamber.