REAL TIME TARGET TOPOGRAPHY TRACKING DURING LASER PROCESSING

摘要

An efficient method of and a system (90) for performing topography measurement facilitates increasing laser machining throughput. Topography measurements at multiple points on a target specimen (30) or continuous real time measurement and monitoring of the target specimen surface topography (66) and target specimen thickness (70) can be performed during a laser machining process. Measurement of the thickness of the target specimen to be laser machined would permit fine tuning of laser energy (28) delivered and result in higher quality target material removal.