APPARATUS OF ALIGNERING SUBSTRATE, APPARATUS OF TREATING SUBSTRATE AND METHOD OF TREATING THE SAME

摘要

A substrate alignment apparatus, a substrate processing apparatus and a substrate processing method are provided to predict a substrate transfer time accurately by cooling the substrate properly regardless of a process. An alignment unit(410) aligns substrates in a predetermined direction. A temperature measuring unit(420) measures the temperature of the aligned substrates. A cooling unit(430) controls the temperature of the substrates. A control unit(450) controls the cooling unit to control the temperature of the substrates. Wherein, the temperature measuring unit is an infrared camera.