MICRO MOLD FABRICATION PROCESS BY FOCUSED ION BEAM USING AMORPHOUS MATERIALS

摘要

A fabrication method of a ultraprecision mold by a focused ion beam using an amorphous material is provided to improve productivity, precision, and thermal and electrical properties of the ultraprecision mold and suppress an increase in fabrication costs of the ultraprecision mold by applying existing ultraprecision fabrication techniques and fabrication techniques using the focused ion beam at the same time. A fabrication method of a ultraprecision mold by a focused ion beam using an amorphous material comprises the steps of: depositing an amorphous material or an amorphous alloy material onto a surface of a workpiece(110) which has been formed into a predetermined shape by using one ultraprecision fabrication process selected from machining, electric discharging, laser machining, and semiconductor etching; and forming an amorphous thin film(120) that has been deposited onto the surface of the workpiece through the deposition process into a final shape using the focused ion beam. The fabrication method comprises using DLC(Diamond-Like Carbon) as the amorphous material, and using metal mixed diamond-like carbon(Me-DLC) as the amorphous alloy material.