发明名称 |
NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME |
摘要 |
<p>There is provided a nitride semiconductor device with low leakage current and high efficiency in which, while a zinc oxide based compound such as Mg x Zn 1-x O (0 ‰¦ x ‰¦ 0.5) is used for a substrate, crystallinity of nitride semiconductor grown thereon is improved and film separation or cracks are prevented. The nitride semiconductor device is formed by laminating nitride semiconductor layers on a substrate (1) made of a zinc oxide based compound such as Mg x Zn 1-x O (0 ‰¦ x ‰¦ 0.5). The nitride semiconductor layers include a first nitride semiconductor layer (2) made of Al y Ga 1-y N (0.05 ‰¦ y ‰¦ 0.2) which is provided in contact with the substrate (1), and nitride semiconductor layers (3) to (5) laminated on the first nitride semiconductor layer (2) so as to form a semiconductor element.</p> |
申请公布号 |
EP1939928(A1) |
申请公布日期 |
2008.07.02 |
申请号 |
EP20060812020 |
申请日期 |
2006.10.19 |
申请人 |
ROHM CO., LTD. |
发明人 |
SHAKUDA, YUKIO;SONOBE, MASAYUKI;ITO, NORIKAZU |
分类号 |
H01L21/205;H01L21/318;H01L33/06;H01L33/16;H01L33/28;H01L33/32 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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