发明名称 |
Sensor block |
摘要 |
<p>The present invention provides a sensor block, which comprises a plurality of sensor chips in combination. Each sensor chip includes a semiconductor substrate having a detection unit formed therein, and two glass substrates bonded to both sides of the semiconductor substrate. One of the glass substrates is shared among the sensor chips and serves as a base block to support the sensor chips.
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申请公布号 |
EP1783498(A3) |
申请公布日期 |
2008.07.02 |
申请号 |
EP20060123534 |
申请日期 |
2006.11.06 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
MATSUMIYA, SADAYUKI;TOMINAGA, ATSUSHI |
分类号 |
G01D21/00;G01D21/02;G01L9/00;G01N27/28;G01P1/02;G01P15/08;H01L29/84 |
主分类号 |
G01D21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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