发明名称 Sensor block
摘要 <p>The present invention provides a sensor block, which comprises a plurality of sensor chips in combination. Each sensor chip includes a semiconductor substrate having a detection unit formed therein, and two glass substrates bonded to both sides of the semiconductor substrate. One of the glass substrates is shared among the sensor chips and serves as a base block to support the sensor chips. </p>
申请公布号 EP1783498(A3) 申请公布日期 2008.07.02
申请号 EP20060123534 申请日期 2006.11.06
申请人 MITUTOYO CORPORATION 发明人 MATSUMIYA, SADAYUKI;TOMINAGA, ATSUSHI
分类号 G01D21/00;G01D21/02;G01L9/00;G01N27/28;G01P1/02;G01P15/08;H01L29/84 主分类号 G01D21/00
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