| 摘要 |
<p>An automatic cleaning apparatus and method of a constant temperature controller are provided to reduce loss caused by replacement of the constant temperature water and working time by supplementing the constant temperature water automatically according to sensed density. A constant temperature tank(120) is connected to a supply pipe. A constant temperature water circulator(140) circulates the constant temperature water within the tank. An outlet pipe(112) is installed between the tank and a process chamber(30), and supplies the constant temperature water to the process chamber. An inlet pipe(122) is installed between the tank and the process chamber, and supplies the constant temperature water to the tank. A density sensor(160) is attached to the inlet pipe, and senses density of the constant temperature water. A three way valve(180) is installed between the density sensor and the tank, and drains the constant temperature water according to the sensed density. A controller(200) controls the circulator and the three way valve according to the sensed density.</p> |
