| 摘要 |
<p>A nozzle aligning device for a gantry is provided to perform a reset operation more conveniently by automatically measuring the proper location of a cross bar and confirming the location through human eyes in real time. A nozzle(30) is installed in a direction crossing a substrate, and sprays a chemical to the surface of the substrate. A cross bar(12) joined with the nozzle moves along the direction of sprayed chemical. A pair of gantry arms(11) support both sides of the cross bar, and move the cross bar along the direction of sprayed chemical. A pair of first controllers(41) finely control both sides of the cross bar along the direction of sprayed chemical. A first measuring device(51) displays a proper location of the cross bar according to the control grade of the first controllers.</p> |
