| 摘要 |
A deposition preventing device is provided to solve a problem that the vacuum evaporation apparatus should be stopped while a new sheet is installed, and a vacuum evaporation apparatus utilizing the deposition preventing device is provided. A vacuum evaporation apparatus(30) comprises: a chamber(31); an evaporation source which is positioned within the chamber, and comprises a plurality of evaporation materials(34) that are sprayed into the chamber and deposited onto a substrate(20); a deposition preventing device(40) comprising a sheet(32) which includes first and second ends(321,322) and adsorbs the evaporation materials, a first reel(35) connected to the first end, and a second reel(36) connected to the second end, the deposition preventing device being positioned oppositely to an evaporation source(39) within the chamber; and an evaporator(33) which supports the substrates, and moves the substrate between the sheet and the evaporator, wherein the sheet moves by rotating the first and second reels. The sheet includes a clean part(323) wound on the first reel, an adsorption part(324) positioned between the first and second reels, and a contamination part(325) wound on the second reel. The vacuum evaporation apparatus further comprises a motor(37) electrically connected to the first and second reels, and a holder(38) installed under the contamination part. The evaporation source includes a hole injection layer(331), a hole transport layer(332), an emitting layer(333), and an electron transport layer(334) sequentially installed on a straight line.
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