摘要 |
A probing test apparatus is provided to replace a probe card easily by sliding a probe holder to be discharged to the one side at the state a cover is closed. A probing test apparatus comprises a chuck supporting a wafer, a probe card which comprises a plurality of probes connected to a semiconductor device, a probe holder(100) on which the probe card is settled, and a transfer unit(300). The transfer unit transfers the probe holder to the outside of the probing test apparatus horizontally so that the probe card is settled on the probe holder, and transfers the probe holder with the probe card back into the probing test apparatus horizontally.
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