METHOD OF SETTING AN INSPECTION AREA

摘要

A method of setting an inspection area is provided to set the inspection area at uniform accuracy always by automatically setting the inspection area in an inspection apparatus. A method of setting an inspection area includes the steps of: radiating light on a semiconductor substrate and detecting the light reflected from the semiconductor substrate(S1); obtaining an image of a pre-inspection area and generating a gray level profile for the pre-inspection area(S2); detecting positions out of a threshold by applying the threshold to the gray level profile(S3); and generating an inspection map by connecting the detected positions with a line on the gray level profile(S4).