发明名称 APPARATUS HAVING NOZZLE PRIMING FUNCTION INCLUDING A NOZZLE HAVING A SENSOR
摘要 An apparatus having a nozzle priming function is provided to reliably perform various processes on a primed nozzle by finely adjusting a gap between a nozzle and a nozzle priming roll. An apparatus having a nozzle priming function includes a nozzle(120), a nozzle driver, a nozzle priming roll(130), and sensors(140a,140b). The nozzle sprays chemical agents. The nozzle driver transfers the nozzle and elevates the nozzle in a vertical direction. The nozzle priming roll is aligned with the nozzle and performs a priming process. The sensors measure a distance between the nozzle and the nozzle priming roll. The nozzle is a slit type nozzle. The sensors are arranged at end portions of the nozzle.
申请公布号 KR20080060973(A) 申请公布日期 2008.07.02
申请号 KR20060135644 申请日期 2006.12.27
申请人 SEMES CO., LTD. 发明人 LEE, DONG KI
分类号 H01L21/304 主分类号 H01L21/304
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