SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

摘要

A semiconductor device and a manufacturing method thereof are provided to prevent penetration of conductive materials into a void by blocking the expansion of a void between fins using a semiconductor pillar. A semiconductor substrate comprises a pair of fins(105a,105b) which are used as an active region. A semiconductor pillar(105d) is inserted between the pins in order to connect the pair of pins. A contact plug is formed on the semiconductor pillar so as to be connected to the upper plane of the pair of fins. Wherein, the fin and the semiconductor pillar are formed of the same semiconductor material.