| 摘要 |
A valve for preventing deposition is provided to maintain a decompressed state of an epitaxial silicon deposition apparatus by preventing deposition powder from being generated on the valve. A valve main body(100) has a structure where a rectangular body is joined to a cylinder body. A shielding board inlet is formed on an end of the rectangular body, and a gas inlet for decompress prevention and a gas inlet for deposition prevention are formed on a lateral side of the rectangular body. A shielding board(200) shields the center part of the cylinder body through the shielding board inlet. A pneumatic cylinder in which a piston rod(310) and a terminal are connected to a lateral side of the shielding board through the shielding board inlet, comprises an advancing/retreating port on the outside plane. A solenoid switch shields the pneumatic cylinder and the shielding board inlet, and drives the piston rod.
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